Advanced Energy's 3kW Paramount® radio frequency (RF) power delivery system offers superior power and impedance measurement performance at 13.56MHz fixed or variable frequency, 50 ohm and non-50 ohm load (voltage in Bobby (VSWR) over 3: 1), to bring you excellent transmission power accuracy and control performance. Able to keep real-time synchronization with the most abruptly changing plasma impedance, the Paramount RF power delivery system delivers faster conversion times, fewer process steps, and shorter process times for next-generation technology nodes. Its impedance measurement accuracy can be comparable to the level of the network analyzer, and the optional frequency tuning can be almost instantaneous (up to the order of milliseconds), its speed than any other products on the market faster. In order to achieve true excellence in accuracy, repeatability and control of the process.
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二、Apex® RF power supply system
Advanced Energy The versatile Apex® family of RF power and power systems utilizes sophisticated RF conversion technology to provide increased product and process reliability in a modular design suitable for vacuum chamber installation. The Apex platform performs excellent in plasma-based thin film processes for semiconductors, flat panel displays, or data storage.
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三、HFV® frequency conversion (~ 2 MHz) power supply
Advanced Energy The flexible HFV® power supply is primarily used as a plasma generator for 200 and 300 mm wafer fabrication, flat panel displays and DVD devices, providing process consistency for ionized physical vapor deposition (CVD) and CVD. This versatile power supply features digital synthesizing variable frequency output and microprocessor control with output power levels of 3, 5 and 8 kW. In addition, the output frequency range is 1.765-2.165 MHz. The frequency tuning parameters on the firmware can be customized to ensure reproducible operation under various vacuum chamber structures and process methods.
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四、CESAR® RF generator
Advanced Energy's powerful and versatile Cesar® platform provides very stable RF power delivery performance as well as a variety of mode options, each with a unique set of features (2,4,13.56,27.12 and 40.68 MHz; 0.3 to 5 kW; has a variety of user interface and input options), allowing you to select a set of components that are particularly suitable for your application - without the need for customizing the generator's long delivery period.
High-quality components and fewer parts optimize reliability and product lifecycle to maximize your investment and process productivity. A comprehensive and highly sensitive operating menu (which can be found on the multi-function front panel of the unit and displayed on a large LCD screen) brings unparalleled convenience - improving the efficiency of the operator and making Training costs are minimized.
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五、HILIGHT ™ RF Generator (13.56MHz, 600W)
Advanced Energy for low power, carrier applications, HiLight series RF generator compact, lightweight, with air-cooled design, specifically designed for the need for on-site installation in the non-traditional 19-inch rack type.
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六、Integro ™ RF Generator
The Advanced Energy Economical Integro ™ RF generator combines a 13.56MHz, 600W RF generator and an auto-matching network in a small footprint. This saves valuable space and makes integration easier. It supports features including: pulse mode, CEX operation and a variety of protection functions.
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七、Navigator® Digital Impedance Matching Network
Advanced Technology The advanced technology of the versatile Navigator® matching network enables fast, accurate and reliable matching at multiple load impedances (from 15W to 30kW). The matching network is equipped with a microprocessor-controlled stepper motor circuit and a user-selectable digital tuning algorithm that provides greater consistency and accuracy than conventional analog tuning methods. This also allows it to optimize the delivery process power for semiconductors, solar, FPD, and MEMs processes (including etch, CVD, HDP-CVD, PVD, and cavity cleaning applications). An optional internal Z'Scan® RF sensor provides real-time measurement and analysis of process power and impedance, enabling you to discover and significantly reduce process variability. In addition, optional virtual front panel (VFP) software enables you to monitor and control a matching network from a personal computer.
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八、Navio ™ Digital Network Matcher
Advanced Energy has expanded its digital network matching platform to incorporate simplicity and stability into the most affordable network adapters on its market. The Navio ™ Network Matcher is available for multi-power and frequency ranges, and with our proven expertise, the Navio ™ Network Matcher matches the plasma's complex impedance with your desired tuning range in a fast, accurate and repeatable manner The According to your specific needs, you can choose the standard configuration or self-configuration. With AE RF power supply, plug and play, the use of virtual panel (VFP) software for monitoring and control.
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九、GenCal™
The Advanced Energy GenCal ™ system offers industry-leading measurement accuracy at discrete frequencies commonly used in the plasma process industry, as well as the same sophisticated hybrid sensor technology used by AE's R & D Award for Plasma Impedance Sensors. This optimized technique can be measured with the accuracy that can not be achieved with other power measuring instruments in the presence of high harmonic content and noise plasma generation signals.
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