Advanced Energy's Sekidenko range of fiber thermometers provides proven temperature measurement technology for advanced temperature control in the manufacture of plasma thin films. With our in situ probes, you can obtain real-time measurement of chip or cavity component temperature for optimization of process control. Our groundbreaking fiber-optic temperature measurement technology facilitates the development of excellent temperature control instruments that are accurate, repeatable and easy to use. With years of experience in various application areas, we have delivered thousands of OFT systems in RTP, CVD, PVD and strip systems, and we have become a recognized leader in advanced contactless temperature measurement.

一、 MXE rapid pyrometer
High speed temperature measuring instruments for precise process control

        The Sekidenko MXE pyrometer combines high speed and accuracy to achieve accurate, non-contact, repeatable measurement and control for demanding applications. Its high-speed sampling rate (up to 10 kHz) performance is suitable for processes with moving objects, such as rotating trays. It is also very suitable for rapidly changing processes, including laser processing or rapid annealing. For easy integration and flexible control, the MXE unit is compact and supports a range of I / O protocols.

Advantage	Features
* Enhanced process monitoring   * Flexible configurable platform   * Improve the accuracy and repeatability of temperature measurements   * Enhanced uniformity   * Increase productivity, yield and yield   * Reduce development time   * Rich measurement function   * Flexible configurable platform	* Real-time measurement of non-contact temperature and emissivity   * Suitable for wide application conditions for rapid temperature measurement   * Selectable temperature and reflect the measured wavelength   * EtherCAT®, USB and RS-232 output options

二、the temperature control equipment
Sekidenko OR4000T & OR4000E Fiber Optic Thermometer & Emissivity Meter

        Advanced Energy's OR4000T and OR4000E Multichannel Fiber Optic Thermometers (OFT) provide industry-leading non-contact temperature measurement for RTP, HDP-CVD, MOCVD, UV curing, and other semiconductor processes. The OR4000T model provides multi-channel functionality to the most demanding semiconductor applications that support read rates up to 2kHz. The OR4000E model offers the same high-speed performance as the OR4000T and adds real-time emissivity compensation. AE Both models are designed as modules that can be quickly adjusted to meet the specific requirements of each process application.

Advantage	Features
* Improve the temperature measurement accuracy   * Increased repeatability to minimize changes   * Improve productivity, yield and throughput   * Improve the stability and reliability of a variety of enclosed spaces and substrate materials	* In situ, non-contact temperature measurement   * Real-time emissivity measurement and compensation   * Industry-leading temperature and emissivity read rates   * Highly flexible, module-based platform architecture   * Complete input and output and external trigger / sync kit

三、the temperature control equipment
Sekidenko OR400M Precision Optical Infrared Thermometer


        The advanced energy OR400M optical thermometer extends the flexibility of the Sekidenko product line to mid-infrared wavelength ranges from 2.3μm to 5.2μm. The OR400M provides single channel temperature measurement for thin film solar, glass and advanced semiconductor processes. The OR400M supports RS-232 and analog data interfaces. Due to its compact design, the OR400M can be easily integrated to meet the unique needs of many process applications.

Advantage：
1、 field measurement of thin film photovoltaic manufacturing steps
2、 to improve substrate uniformity
3、 designed for solar film and glass technology and design
4、 comprehensive measurement
5、 high-speed solid-state detectors
6、configurable filters, detectors and optical transmission systems

四、 the temperature control equipment
Sekidenko OR400T fiber thermometer

        Advanced Energy OR400T Fiber Optic Thermometer (OFT) extends the flexibility of the OFT product line to provide cost-competitive non-contact solutions for a wide range of high-volume semiconductor applications, including plasma-assisted chemical vapor deposition (PECVD ), Low pressure chemical vapor deposition (LPCVD), physical vapor deposition (PVD), and metal etching. As the OR400T has a compact design, it can be easily integrated to meet the special requirements of a variety of process applications.

Advantage	Features
* Improve the temperature measurement accuracy   * Improve wafer uniformity   * Provides a cost-competitive alternative to thermocouple temperature measurement   * Improve productivity, yield and throughput	* Compact, single channel design   * In situ, non-contact temperature measurement   * Supports RS-232 and analog data interface up to 20 temperature readings per second   * Better low temperature performance