Advanced Energy achieves advanced plasma process control with high precision power output, frequency tuning and multi-stage pulses. To manufacture state-of-the-art integrated circuits (ICs), Advanced Energy has deployed new processes and materials for the creation of transistors or memory cells. The decline in feature size and atomic accuracy makes extreme process control critical. New device architectures (3D-NAND and Fin FET) are driving the need for multi-patterning (double and quadruple) - making innovative etching and deposition processes critical.
Advanced Energy debuts at SEMICON China 2019
Advanced Energy is the market leader in power delivery and control solutions for critical etch, deposition, inspection, implantation and annealing processes. Advanced Energy leverages platform architecture and commitment to innovation to anticipate application requirements and quickly design products and solutions based on customer specific requirements.
Advanced Energy's Sekidenko range of fiber optic thermometers provide proven temperature measurement technology for advanced temperature control in plasma film manufacturing. With our in-situ probes, you get real-time measurements of the temperature of your chip or cavity components for process control optimization. Our groundbreaking fiber optic temperature measurement technology facilitates the development of excellent temperature control instruments that are accurate, repeatable and easy to use. With years of experience in a variety of applications, we have delivered thousands of OFT systems in RTP, CVD, PVD and strip systems, and we have become a recognized leader in advanced non-contact temperature measurement.
