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汽车功率元器件市场前景广阔
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时间：2017-05-02 09:01:12
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汽车功率电子产品正成为半导体行业的关键驱动因素之一。这些电子产品包括功率元器件，是支撑新型电动汽车续航里程达到至少200英里的核心部件。
虽然智能手机的出货量远高于汽车（2015年为14亿部，汽车销量为8,800万辆），但汽车的半导体零件含量却高得多。汽车功率IC稳健增长，2015 - 2020年该行业的年复合增长率预计将达8%。尤其是电池驱动的电动汽车在该行业成为强劲增长推动力，2015年5月Teardown.com针对宝马i3电动车的报告显示，该车型物料清单中包含100多个电源相关芯片。
与遵循摩尔定律不断缩小尺寸的先进逻辑晶体管不同，功率元器件FET通常运用更老的技术节点，使用200毫米（和更小的）硅片。然而，功率元器件在过去的几十年中不断发展和升级。例如，较厚的PVD铝镀层（3-10微米）必须沉积在功率元器件的正面，以实现散热并提高电学性能。如果没有正确沉积，厚铝层容易出现晶须和错位，导致灾难性的后果。应用材料公司的Endura PVD HDR高速沉积铝反应腔器可确保尽可能减少此类缺陷，并使沉积速率较其他与之竞争的技术高50%以上。
此外，5微米至150微米以上的厚外延硅片，进行复杂的掺杂以后，能够实现低电阻（Rds）、较高的关断电阻（Roff）和更快的开关速度。
与传统外延反应腔相比，银威集团
半导体薄膜堆层的结构变化，例如将栅极结构从平面（横向器件）转换成沟道结构（垂直器件），使得绝缘栅双极晶体管（IGBT）能够以更低的损耗率实现更快的开关速度。类似地，从多层外延技术转向深沟槽填充工艺亦能大幅提升超结MOSFET（SJM）的性能。
蚀刻工艺需要一些改进和调整，以适应这些方案，其中包括更高的深宽比结构。经改进后的外延硅膜和注入掺杂分布也能增强产品性能。
功率元器件制造商不断精益求精。公开资料显示日立的高导电性IGBT采用单独的浮动P层，以提高栅极可控性和接通电压。ABB半导体在沟槽栅下构建P型柱状注入，以产生超结效应，从而达到更快的开关速度。
通过减薄晶片厚度，可有效减少高速开关的存储电荷。富士电机最近研发出漂移层更薄、沟槽间距更小、电场终止层更强的第七代IGBT。
然而，专家们纷纷意识到，硅基器件的各项性能已接近极限。功率元器件由于受到硅材料本身的限制，每一次性能的提升仅能带来些许改进。
宽禁带功率元器件
功率IC产业在寻找新的宽禁带（WBG）材料，使半导体性能提升到全新的水平。碳化硅（SiC）和氮化镓（GaN）是当前的首选材料，两者均有一定的优势及劣势。作为半导体复合材料，他们具有更大的禁带宽度和击穿场强，制成的功率元器件具有硅材料无法匹敌的性能。他们被广泛认为将引领下一代功率元器件，开启半导体时代大变革。
