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Advanced Energy NEXT-GENERATION RF POWER SOLUTIONS
Source：本站Time：2020/1/5 20:20:37
Digital Architecture and Industry-Leading RF Plasma Control
Advanced Energy PARAMOUNT® RF POWER SYSTEMS
1、Optimizes film uniformity and throughput with unprecedented power delivery accuracy
2、Enables faster, seamless process transitions
3、Provides advanced pulsing and pulse synchronization
4、Reduces RF delivery system complexity
5、Reduces arc-caused contamination and damage
Advanced Energy NAVIGATOR® II DIGITAL MATCHING NETWORKS
1、Speeds matching response time
2、Tightens process control
3、Helps increase tool throughput and product yield
4、Improves reliability and cost of ownership
Advanced Energy PARAMOUNT® RF POWER SYSTEMS
1、Optimizes film uniformity and throughput with unprecedented power delivery accuracy
2、Enables faster, seamless process transitions
3、Provides advanced pulsing and pulse synchronization
4、Reduces RF delivery system complexity
5、Reduces arc-caused contamination and damage
Advanced Energy NAVIGATOR® II DIGITAL MATCHING NETWORKS
1、Speeds matching response time
2、Tightens process control
3、Helps increase tool throughput and product yield
4、Improves reliability and cost of ownership
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